Nanofabrication Lab
The College of Engineering’s Class 1,000 Davidson Foundation Cleanroom provides 2,937 square feet of filtered space available for faculty and industry research as well as workforce development. This multi-user nanofabrication lab offers lithography, deposition, etch and metrology to support research and pilot production of semiconductor, photonic and quantum devices.
Watch a video about the Cleanroom.
Equipment
The Nanofabrication Lab is outfitted with various machinery to suit a variety of needs. Learn more about our equipment (organized by function):
- Heidelberg uMLA Maskless Aligner
- Myriad/Quintel Mask Aligner
- HMDS Prime Oven
- Acid Clean Station
- Spin Rinse Dryer
- Spin, Bake, Develop Stations
- Liftoff Solvent Processing Station
- Vacuum Oven
- Semicore Electron Beam Evaporator
- 6 pockets, cryo-pumped
- Semicore Sputtering System
- Loadlock
- Pulsed DC, RF power supplies
- Ar, O2, N2 gases
- Substrate heating to 500C
- Anatech Quartz Barrel Asher
- O2, Ar, CF4
- Oxford Instruments Cobra ICP RIE Atomic Layer Etcher
- Ar, O2, H2, SF6, CF4, CHF3, others available
- Cryogenic etching, including cryo-DSIE
- 2x Atomic Layer Etch manifolds for fast-switching ALE processes
- Filmetrics Reflectometer
- Photoresist thickness measurement
- Optical Microscope
- Nano Images SNE-Alpha Desktop SEM
- Film Sense Multiwavelength Ellipsometer
- Jandel Four Point Probe
- Filmetrics ProFilm Optical Profilometer
- Bruker Dektak Pro-S Profilometer (arrives summer 2025)
- Westbond Dual-Head Manual Wirebonder
- Au ball bonding and Al ultrasonic wedge bonding
- Nano Dimension Dragon Fly IV 3D PCB Printer
- Essemtec Fox Pick and Place and Reflow Oven
- Micromanipulator Versa Probe Station
Contact
Russ Renzas, Cleanroom Director
College of Engineering
rrenzas@unr.edu
Russ Renzas is an expert in materials science, atomic layer processing and superconducting quantum circuit fabrication. He has coauthored over 20 academic papers with over 3,500 citations and two patents. Renzas was previously director of Device Fabrication at Rigetti Computing, a venture-backed superconducting quantum computer manufacturer now listed on NASDAQ. He has given invited seminars at leading national labs and universities worldwide, including Harvard, Yale, Caltech, Fermilab, PSI and IIT Delhi. He has a BSE in electrical engineering from Princeton University (2005) and a Ph.D. in physical chemistry from the University of California, Berkeley (2010). Renzas has lived in Reno since 2020. Outside the lab he enjoys Nordic skiing, snowboarding, whitewater kayaking, complex board games, volunteering in the community and occasionally assisting with technical due diligence for angel investment opportunities with Princeton Alumni Angels.