Benjamin Del Rosario

Scholar: Benjamin Del Rosario

Benjamin Del Rosario

Major: Mechanical Engineering

Faculty Mentors: Dr. Kam Leang

Research Topic: Utilizing piezoelectric actuators for high speed nanopositioning in electron probe microscopy

Abstract: This research proposes the design of a three degree-of-freedom flexure-based nanopositioning platform driven by compact piezo-stack actuators. The platform is designed for micro/nano robotic applications that include semiconductor manufacturing and desktop nano-factory assembly systems. The platform is capable of two degrees of lateral translation, x and y, and rotation in the same plane. Movement of the robotic platform is achieved by stick-slip motion. Finite element modeling is used to optimize the design of the mechanical platform, and a nonlinear dynamics model (Maxwell Slip Model) is proposed for predicting the platform's movements as well as for control system design. Strain-based sensing is employed to measure the motion of the stage, and a feedback-based controller is used to ensure high-performance operation in the presence of hysteresis nonlinearity and external disturbances. The platform is characterized to determine travel range, bandwidth, and limitations. Simulation and experimental results are presented to illustrate the performance of the nano-robotic positioning platform.

New Scholar: 2011 cohort

Graduating With Baccalaureate Degree: 2012

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